Title: Effect of Cl in gate oxidation
Authors: Mertens, Paul ×
McGeary, M. J
Schaekers, Marc
Sprey, Hessel
Vermeire, Bert
Depas, Michel
Meuris, Marc
Heyns, Marc #
Issue Date: 1997
Host Document: Proceedings of Material Research Society 1977 Spring Meeting vol:Vol. 477 pages:89-100
Conference: Science and Technology of Semiconductor Surface Preparation; April 1997. San Francisco, Calif., USA. location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Clinical Residents Medicine
Surface and Interface Engineered Materials
× corresponding author
# (joint) last author

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