Title: Electroless copper deposition on TiN
Authors: Min, Woo Sig
Palmans, Roger
Maex, Karen
Lee, D. N
Issue Date: 1997
Conference: 1997 Joint International Meeting ECS (Electrochemical Society) and ISE (International Society of Electrochemistry) : Symposium o location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

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