|ITEM METADATA RECORD
|Title: ||Electroless copper deposition on TiN|
|Authors: ||Min, Woo Sig|
Lee, D. N
|Issue Date: ||1997 |
|Conference: ||1997 Joint International Meeting ECS (Electrochemical Society) and ISE (International Society of Electrochemistry) : Symposium o location:Leuven Belgium|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
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