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Title: Local mechanical stress induced defects for Ti and Co/Ti silicidation in sub-0.25?m MOS-technologies
Authors: Steegen, An
Maex, Karen
De Wolf, Ingrid #
Issue Date: 1998
Host Document: pages:200-1
Conference: 1998 VLSI Technology Symposium; 9-11 June 1998; Honolulu, Hawai, USA.
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
Electrical Engineering - miscellaneous
# (joint) last author

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