4th International Workshop on Stress Induced Phenomena in Metallization; 4-6 June 1997; Tokyo, Japan., Date: 1997/06/04 - 1997/06/06, Location: JAPAN, UNIV TOKYO, TOKYO
Publication date:
1998-01-01
Pages:
427 -
38
ISSN:
1-56396-682-4
Publisher:
AIP Publishing
STRESS INDUCED PHENOMENA IN METALLIZATION - FOURTH INTERNATIONAL WORKSHOP
Author:
Maex, Karen
De Wolf, Ingrid ; Howard, Dave ; Steegen, An ; Lauwers, A ; Okabayashi, H ; Shingubara, S ; Ho, PS
Keywords:
Science & Technology, Technology, Physical Sciences, Materials Science, Multidisciplinary, Physics, Applied, Materials Science, Physics