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Title: TiSi2and CoSi2: relevant materials issues for deep sub-micron technologies
Authors: Maex, Karen
De Wolf, Ingrid
Howard, Dave
Steegen, An
Lauwers, A #
Issue Date: 1998
Host Document: pages:427-38
Conference: 4th International Workshop on Stress Induced Phenomena in Metallization; 4-6 June 1997; Tokyo, Japan.
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
Electrical Engineering - miscellaneous
# (joint) last author

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