ITEM METADATA RECORD
Title: In situ gas analysis on an RTP tool with APIMS
Authors: Vereecke, Guy ×
Kondoh, Eiichi
Richardson, Paul
Maex, Karen
Heyns, Marc
Nényei, Z #
Issue Date: 1998
Host Document: pages:519-26
Conference: The ICCCS 14th International Symposium on Contamination Control; 44th Annual Meeting of Inst. Environmental Science and Technolo location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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