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Title: Processes in ultrthin buried oxide synthesis stimulated by low dose ion implantation
Authors: Litovchenko, V. G ×
Efremov, A. A
Romanyuk, B. N
Mel'nik, V. P
Claeys, Cor #
Issue Date: 1998
Series Title: Journal of the Electrochemical Society vol:145 issue:8 pages:2964-9
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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