Title: Optimisation of bottom-ARC processes with respect to CD control
Authors: Op de Beeck, Maaike ×
Vandenberghe, Geert
Jaenen, Patrick
Zhang, Fenghong
Delvaux, Christie
Van Puyenbroeck, Ilse
Ronse, Kurt
Lamb, J. E
van der Hilst, J. B. C #
Issue Date: 1998
Series Title: Future Fab International vol:5 pages:205-10
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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