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Title: Sealing of porous low-k dielectric materials: UV-O3 oxidised CVD silicon oxycarbide materials
Authors: Whelan, Caroline ×
Cecchet, Francesca
Le, Quoc Toan
Satta, Alessandra
Pireaux, Jean-Jaques
Maex, Karen
Rudolf, Petra #
Issue Date: 2002
Series Title: Physicalia Magazine vol:24 issue:3 pages:201-210
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Physics and Astronomy - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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