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Title: Critical role of degassing for hot aluminum filling
Authors: Proost, Joris ×
Kondoh, Eiichi
Vereecke, Guy
Heyns, Marc
Maex, Karen #
Issue Date: 1998
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:16 issue:4 pages:2091-8
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Department of Materials Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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