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Title: A study of growth mechanism of TiN and WCN barrier films deposited by atomic layer deposition on different substrates
Authors: Satta, Alessandra ×
Schuhmacher, Jörg
Whelan, Caroline
Vandervorst, Wilfried
Brongersma, Sywert
Beyer, Gerald
Brijs, Bert
Conard, Thierry
Maex, Karen
Vantomme, André
Viitanen, M.M
Brongersma, H.H #
Issue Date: 2002
Host Document: pages:21
Conference: B-ALD-5: The 5th Baltic Symposium on Atomic Layer Deposition location:Leuven Belgium date:24/10/02
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Physics and Astronomy - miscellaneous
Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
Nuclear and Radiation Physics Section
× corresponding author
# (joint) last author

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