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|ITEM METADATA RECORD
|Title: ||A study of growth mechanism of TiN and WCN barrier films deposited by atomic layer deposition on different substrates|
|Authors: ||Satta, Alessandra ×|
Brongersma, H.H #
|Issue Date: ||2002 |
|Host Document: ||pages:21|
|Conference: ||B-ALD-5: The 5th Baltic Symposium on Atomic Layer Deposition location:Leuven Belgium date:24/10/02|
|Publication status: ||published|
|KU Leuven publication type: ||IMa|
|Appears in Collections:||Physics and Astronomy - miscellaneous|
Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
Nuclear and Radiation Physics Section
× corresponding author|
# (joint) last author|
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