Title: Optimizing p-type ultra-shallow junctions for the 65 nm CMOS technology node
Authors: Pawlak, Bartek ×
Lindsay, Richard
Surdeanu, Radu
Stolk, Peter
Maex, Karen #
Issue Date: 2002
Publisher: IEEE
Host Document: pages:21-14
Conference: Proceedings of the 14th International Conference on Ion Implantation Technology location:Leuven Belgium date:22/09/02
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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