|ITEM METADATA RECORD
|Title: ||Salicides for 0.18 um and below|
|Authors: ||Maex, Karen #|
|Issue Date: ||1998 |
|Conference: ||Proceedings of the 28th European Solid-State Device Research Conference - ESSDERC'98; 8-10 Sept. 1998; Bordeaux, France.|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
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