|ITEM METADATA RECORD
|Title: ||Nanoindentation on low-k dielectrics|
|Authors: ||Brongersma, Sywert|
|Issue Date: ||2002 |
|Conference: ||MRS Spring Meeting Symposium J: Texture and Microstructure in Electronic and Magnetic Films location:Leuven Belgium date:01/04/02|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
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