Title: Nanoindentation on low-k dielectrics
Authors: Brongersma, Sywert
Nolan, M
Vervoort, Iwan
Maex, Karen
Issue Date: 2002
Conference: MRS Spring Meeting Symposium J: Texture and Microstructure in Electronic and Magnetic Films location:Leuven Belgium date:01/04/02
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

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