Title: Grazing-emission x-ray fluorescence spectrometry: a novel tool for surface contamination analysis and thin film metrology
Authors: de Bokx, P. K ×
Kidd, S. J
Wiener, G
Urbach, H. P
De Gendt, Stefan
Mertens, Paul
Heyns, Marc #
Issue Date: 1998
Host Document: pages:1511-1523
Conference: Semiconductor Silicon 1998. Proceedings of the 8th International Symposium on Silicon Materials Science and Technology;
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Clinical Residents Medicine
Surface and Interface Engineered Materials
× corresponding author
# (joint) last author

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