|ITEM METADATA RECORD
|Title: ||The integration of low k hydrogen silsesquioxanes (HSQ) in sub 0.35?m processes|
|Authors: ||Meynan, H|
Van Hove, Marleen
|Issue Date: ||1998 |
|Conference: ||3rd International Symposium on Low and High Dielectric Constant Materials: Materials Science, Processing and Reliability Issues;|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
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