Title: The integration of low k hydrogen silsesquioxanes (HSQ) in sub 0.35?m processes
Authors: Meynan, H
Uttech, R
Gao, Teng
Van Hove, Marleen
Maex, Karen
Issue Date: 1998
Conference: 3rd International Symposium on Low and High Dielectric Constant Materials: Materials Science, Processing and Reliability Issues;
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

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