Title: A method to interpret micro-Raman experiments made to measure nonuniform stresses: application to local oxidation of silicon structures
Authors: Pinardi, Kuntjoro ×
Jain, Suresh
Willander, M
Atkinson, A
Maes, Herman
Van Overstraeten, Roger #
Issue Date: 1998
Publisher: American Institute of Physics
Series Title: Journal of Applied Physics vol:84 issue:5 pages:2507-12
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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