Title: Limitation of HF-based chemistry for deep-submicron contact hole cleaning on silicides
Authors: Baklanov, Mikhaïl ×
Kondoh, Eiichi
Donaton, R. A
Vanhaelemeersch, Serge
Maex, Karen #
Issue Date: 1998
Series Title: Journal of the Electrochemical Society vol:145 issue:9 pages:3240-6
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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