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Title: Diode assessment of material characteristics in internally gettered and non-gettered Czochralski silicon: problems, pitfalls and guidelines
Authors: Simoen, Eddy ×
Poyai, Amporn
Claeys, Cor
Czerwinski, A
Gaubas, Eugenijus #
Issue Date: 1998
Host Document: pages:42-51
Conference: 2nd International Conference on Materials for Microelectronics; 14-15 Sept. 1998. location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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