Title: Active dopant characterization methodology for Germanium
Authors: Clarysse, Trudo ×
Eyben, Pierre
Janssens, Tom
Hoflijk, Ilse
Vanhaeren, Danielle
Satta, Alessandra
Meuris, Marc
Vandervorst, Wilfried #
Issue Date: 2005
Host Document: pages:373-382
Conference: Proceedings of the 8th Int. Workshop on the Fabrication , Characterization and Modeling of Ultra Shallow Junctions in Semicond. location:Leuven Belgium date:05/06/05
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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