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Title: Defect removal, dopant diffusion and activation issues in ion-implanted shallow junctions fabricated in crystalline germanium substrates
Authors: Simoen, Eddy ×
Satta, Alessandra
Meuris, Marc
Janssens, Tom
Clarysse, Trudo
Benedetti, Alessandro
Demeurisse, Caroline
Brijs, Bert
Hoflijk, Ilse
Vandervorst, Wilfried
Claeys, Corneel #
Issue Date: 2005
Publisher: Trans Tech
Host Document: pages:691-696
Conference: Gettering and Defect Engineering in Semiconductor Technology XI. Proceedings of the 11th International Autumn Meeting location:Leuven Belgium date:25/09/05
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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