Title: H2/D2 isotopic effect on negative bias temperature instabilities in SiOx/HfSiON/TaN gate stacks
Authors: Houssa, Michel
Aoulaiche, Marc
Stesmans, Andre
De Gendt, Stefan
Groeseneken, Guido
Heyns, Marc #
Issue Date: 2005
Conference: 36th IEEE Semiconductor Interface Specialists Conference location:Leuven Belgium date:01/12/05
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Electrical Engineering - miscellaneous
Semiconductor Physics Section
Molecular Design and Synthesis
# (joint) last author

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