Continued scalability of copper/low-k interconnects
Publication date:
2005-01-01
Author:
Brongersma, Sywert
Carbonell, Laure ; Vanstreels, Kris ; Iacopi, Francesca ; D'Haen, Jan ; Zhang, Wenqi ; Travaly, Youssef ; Demuynck, Steven ; Tokei, Zsolt ; De Ceuninck, Ward ; Maex, Karen