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Title: Novel design and fabrication of a MEMS electrostatic vibration scavenger
Authors: Sterken, Tom ×
Fiorini, Paolo
Baert, Kris
Borghs, Gustaaf
Puers, Robert #
Issue Date: 2004
Host Document: pages:18-21
Conference: The 4th Int. Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications - PowerMEMS location:Leuven Belgium date:28/11/04
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Faculty of Engineering Science - miscellaneous
Physics and Astronomy - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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