Title: Diffusion barrier integrity and electrical performance of Cu/porous dielectric damascene lines
Authors: Iacopi, Francesca ×
Tokei, Zsolt
Stucchi, Michele
Lanckmans, Filip
Maex, Karen #
Issue Date: 2003
Series Title: IEEE Electron Device Letters vol:24 issue:3 pages:147-149
ISSN: 0741-3106
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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