Title: Deep levels in oxygenated n-type high-resistivity FZ silicon before and after a low-temperature hydrogenation step
Authors: Simoen, Eddy ×
Claeys, Corneel
Job, R
Ulyashin, A.G
Fahrner, W.R
Tonelli, G
De Gryse, O
Clauws, P #
Issue Date: 2003
Series Title: Journal of the Electrochemical Society vol:150 issue:9 pages:G520-G526
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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