A novel approach to analyse FTIR spectra of precipitates in moderately and heavily doped silicon
De Gryse, O × Vanhellemont, J Clauws, P Lebedev, O Van Landuyt, J Simoen, Eddy Claeys, Corneel #
Elsevier science bv
Physica B vol:340-342 pages:1013-1017
Infrared absorption spectra of composite precipitates are analysed with a modified Day-Thorpe algorithm, assuming a precipitated phase consisting of a mixture of two components with known optical properties. Additional constraints are introduced when solving the model equations by using a priori knowledge making the algorithm more reliable. It is shown that this novel approach allows determining both morphology and composition of precipitates.