A novel approach to analyse FTIR spectra of precipitates in moderately and heavily doped silicon

De Gryse, O; Vanhellemont, J; Clauws, P; Lebedev, O; Van Landuyt, J; Simoen, Eddy; Claeys, Corneel

A novel approach to analyse FTIR spectra of precipitates in moderately and heavily doped silicon

Author:

De Gryse, O

Vanhellemont, J ; Clauws, P ; Lebedev, O ; Van Landuyt, J ; Simoen, Eddy ; Claeys, Corneel

Keywords:

spectral function, ftir, silicon, silicon oxide, precipitate, infrared-spectroscopy, oxygen, absorption, growth, 0204 Condensed Matter Physics, 0206 Quantum Physics, 0303 Macromolecular and Materials Chemistry, General Physics, 5104 Condensed matter physics

Abstract:

Infrared absorption spectra of composite precipitates are analysed with a modified Day-Thorpe algorithm, assuming a precipitated phase consisting of a mixture of two components with known optical properties. Additional constraints are introduced when solving the model equations by using a priori knowledge making the algorithm more reliable. It is shown that this novel approach allows determining both morphology and composition of precipitates.