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Title: A novel approach to analyse FTIR spectra of precipitates in moderately and heavily doped silicon
Authors: De Gryse, O ×
Vanhellemont, J
Clauws, P
Lebedev, O
Van Landuyt, J
Simoen, Eddy
Claeys, Corneel #
Issue Date: 2003
Publisher: Elsevier science bv
Series Title: Physica B vol:340-342 pages:1013-1017
Abstract: Infrared absorption spectra of composite precipitates are analysed with a modified Day-Thorpe algorithm, assuming a precipitated phase consisting of a mixture of two components with known optical properties. Additional constraints are introduced when solving the model equations by using a priori knowledge making the algorithm more reliable. It is shown that this novel approach allows determining both morphology and composition of precipitates.
URI: 
ISSN: 0921-4526
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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