Title: Electron microscopic studies of Co- and Ti-germanosilicide films formed on SiGe layers
Authors: Jin, S ×
Donaton, R. A
Bender, Hugo
Maex, Karen #
Issue Date: 1998
Host Document: pages:133-8
Conference: Electron Microscopy of Semiconducting Materials and ULSI Devices; Symposium held April 15-16, 1998, San Francisco, CA, USA.
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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