Title: Measurement of nonuniform stresses in semiconductors by the micro-Raman method
Authors: Pinardi, Kuntjoro ×
Jain, Suresh
Maes, Herman
Van Overstraeten, Roger
Willander, M
Atkinson, A #
Issue Date: 1998
Host Document: pages:507-12
Conference: Thin Films: Stresses and Mechanical Propeties VII; Symposium held 1-5 Dec. 1997; Boston, MA, USA.
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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