Title: Characteristics of selective epitaxial SiGe deposition processes for recessed source/drain applications
Authors: Loo, Roger ×
Verheyen, Peter
Eneman, Geert
Rooyackers, Rita
Leys, Frederik
Shamiryan, Denis
De Meyer, Christina
Absil, Philippe
Caymax, Matty #
Issue Date: 2006
Series Title: Thin Solid Films vol:508 issue:01/02/07 pages:266-269
ISSN: 0040-6090
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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