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Title: Control of texture and crystallization in sol-gel PZT ferroelectric capacitors with reactively sputtered RuO2 electrode layers
Authors: Norga, Gerd
Wouters, D. J
Fé, Laura
Bartic, Andrei
Maes, Herman
Issue Date: 1998
Conference: MRS Fall Meeting; 30 Nov. - 4 Dec. 1998; Boston, MA, USA. location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems

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