Title: Accurate reliability evaluation of non-uniform ultrathin and high-k layers
Authors: Roussel, Philippe ×
Degraeve, Robin
Kerber, Andreas
Pantisano, Luigi
Groeseneken, Guido #
Issue Date: Mar-2003
Publisher: IEEE
Host Document: pages:29-33
Conference: Proceedings 41st Annual IEEE International Reliability Physics Symposium location:Leuven Belgium date:30/03/03
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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