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Title: P-N junction diagnostics of the electrical epi-layer quality: a feasibility study
Authors: Simoen, Eddy ×
Poyai, Amporn
Claeys, Cor
Czerwinski, A #
Issue Date: 1998
Host Document: pages:410-20
Conference: Proceedings of the 5th International Symposium on High Purity Silicon V; location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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