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Title: Gettering and stimulating factors on the formation of SIMOX structures with thin dielectric layer: experiment and modelling
Authors: Romanyuk, B. N
Litovchenko, V. G
Efremov, A. A
Mel'nik, V. P
Claeys, Cor
Issue Date: 1998
Conference: NATO Advanced Research Workshop on "Perspectives, Sciences and Technologies of Novel Silicon-on-Insulator Devices"; 12-15 Octobe
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems

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