Title: Influence of the anneal conditions on arsenic activation during solid-phase epitaxial regrowth
Authors: Pawlak, Bartek ×
Duffy, Ray
Janssens, Tom
Vandervorst, Wilfried
Maex, Karen
Smith, A.J
Cowern, N.E.B
Dao, T
Tamminga, Y #
Issue Date: Jul-2005
Series Title: Applied Physics Letters vol:87 issue:3 pages:031915-1-031915-3
ISSN: 0003-6951
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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