Title: Electrical characterization of high-dielectric-constant/SiO2 metal-oxide-semiconductor gate stacks by a conductive atomic force microscope
Authors: Blasco, X ×
Porti, M
Nafria, M
Petry, Jasmine
Vandervorst, Wilfried #
Issue Date: Sep-2005
Publisher: IOP Pub.
Series Title: Nanotechnology vol:16 issue:9 pages:1506-1511
ISSN: 0957-4484
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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