Title: Processing damage and electrical performance of porous dielectrics in narrow spaced interconnects
Authors: Iacopi, Francesca ×
Travaly, Youssef
Stucchi, Michele
Struyf, Herbert
Peeters, Stefan
Jonckheere, Rik
Leunissen, Peter
Tokei, Zsolt
Sutcliffe, Victor
Richard, Olivier
Van Hove, Marleen
Maex, Karen #
Issue Date: 2004
Publisher: MRS
Conference: Materials, Technology, and reliability for Advanced Interconnects and Low-k Dielectrics location:San Francisco, CA, USA date:12/04/04
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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