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Title: Process and properties of ALD tungsten nitride carbide barrier films for interconnects
Authors: Schuhmacher, Jörg
Tokei, Zsolt
Beyer, Gerald
Li, Yunlong
Stokhof, Maarten
Schaekers, Marc
Maex, Karen
Issue Date: 2003
Conference: Advanced Metallization Conference location:Montreal, Canada date:21/10/03
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems

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