|ITEM METADATA RECORD
|Title: ||Single step alkaline cleaning solution for advanced semiconductor cleaning|
|Authors: ||Baeyens, Martien|
Kolbesen, B. O
Martin Hoyas, Ana
|Issue Date: ||1998 |
|Conference: ||4th International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS '98); 21-23 September 1998; Oostende, Belgium. location:Leuven Belgium|
|Publication status: ||published|
|KU Leuven publication type: ||IMa|
|Appears in Collections:||Clinical Residents Medicine|
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