ITEM METADATA RECORD
Title: Single step alkaline cleaning solution for advanced semiconductor cleaning
Authors: Baeyens, Martien
Hub, W
Kolbesen, B. O
Martin Hoyas, Ana
Mertens, Paul
Issue Date: 1998
Conference: 4th International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS '98); 21-23 September 1998; Oostende, Belgium. location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Clinical Residents Medicine

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