Title: Successful selective epitaxial Si1-xGex deposition process for HBT-BiCMOS and high-mobility hetero-channel pMOS applications
Authors: Loo, Roger ×
Caymax, Matty
Peytier, Ivan
Decoutere, Stefaan
Collaert, Nadine
Verheyen, Peter
Vandervorst, Wilfried
De Meyer, Christina #
Issue Date: Oct-2003
Publisher: Electrochemical Society
Series Title: Journal of the Electrochemical Society vol:150 issue:10 pages:G638-G647
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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