|ITEM METADATA RECORD
|Title: ||In-line and non-destructive analysis of epitaxial Si1-x-yGexCy by spectroscopic ellipsometry and comparison with other established techniques|
|Authors: ||Loo, Roger ×|
Vandervorst, Wilfried #
|Issue Date: ||2003 |
|Host Document: ||pages:329-338|
|Conference: ||Analytical and Diagnostic Techniques for Semiconductor Materials and Processes location:Leuven Belgium date:27/04/03|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Electrical Engineering - miscellaneous|
× corresponding author|
# (joint) last author|
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