Title: In-line and non-destructive analysis of epitaxial Si1-x-yGexCy by spectroscopic ellipsometry and comparison with other established techniques
Authors: Loo, Roger ×
Meunier-Beillard, Philippe
Delhougne, Romain
Koumoto, T
Geenen, Luc
Brijs, Bert
Vandervorst, Wilfried #
Issue Date: 2003
Publisher: ECS
Host Document: pages:329-338
Conference: Analytical and Diagnostic Techniques for Semiconductor Materials and Processes location:Leuven Belgium date:27/04/03
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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