Title: UV-assisted curing: an effective technique for toughening of low-k organosilicate films
Authors: Iacopi, Francesca
Waldfried, Carlo
Houthoofd, Kristof
Guyer, Eric
Gage, David
Carlotti, Giovanni
Travaly, Youssef
Abell, Thomas
Escorcia, Orlando
Beyer, Gerald
Berry, Ivan
Dauskardt, Reinhold
Maex, Karen
Issue Date: 2005
Conference: Advanced Metallization Conference location:Dresden Germany date:27/09/05
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
Centre for Surface Chemistry and Catalysis

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