Title: Effect of N2 annealing on AlZrO oxide
Authors: Petry, Jasmine ×
Richard, Olivier
Vandervorst, Wilfried
Conard, Thierry
Chen, Jerry
Cosnier, Vincent #
Issue Date: Jul-2003
Publisher: Published by AVS through the American Institute of Physics
Series Title: Journal of Vacuum Science & Technology A, Vacuum, Surfaces and Films vol:21 issue:4 pages:1482-1487
ISSN: 0734-2101
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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