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Title: A low frequency electrical test set-up for the reliability assessment of capacitive RF MEMS switches
Authors: De Wolf, Ingrid ×
van Spengen, Willem Merlijn
Mertens, Robert
Puers, Robert #
Issue Date: May-2003
Publisher: IOP
Series Title: Journal of micromechanics and microengineering: structures, devices and systems vol:13 issue:13 pages:604-612
ISSN: 0960-1317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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