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Title: Physical characterization of ultrathin high k dielectrics
Authors: Vandervorst, Wilfried ×
Brijs, Bert
Bender, Hugo
Conard, Thierry
Petry, Jasmine
Richard, Olivier
Van Elshocht, Sven
Delabie, Annelies
Caymax, Matty
De Gendt, Stefan
Cosnier, Vincent
Green, Martin
Chen, Jerry #
Issue Date: 2003
Publisher: IEEE
Host Document: pages:40-50
Conference: 8th International Symposium on Plasma-and Process-Induced Damage location:Leuven Belgium date:24/04/03
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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