Title: Charge trapping and dielectric reliability of SiO2/AI2O3 gate stacks with TiN electrodes
Authors: Kerber, Andreas ×
Cartier, Eduard
Degraeve, Robin
Roussel, Philippe
Pantisano, Luigi
Kauerauf, Thomas
Groeseneken, Guido
Maes, Herman
Schwalke, U #
Issue Date: 2003
Publisher: Institute of Electrical and Electronics Engineers
Series Title: IEEE transactions on electron devices vol:50 issue:5 pages:1261-1269
ISSN: 0018-9383
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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