Title: On the thermal stability of atomic layer deposited TiN as gate electrode in MOS devices
Authors: Westlinder, J ×
Schram, Tom
Pantisano, Luigi
Cartier, Eduard
Kerber, Andreas
Lujan, Guilherme
Olsson, J
Groeseneken, Guido #
Issue Date: 2003
Series Title: IEEE Electron Device Letters vol:24 issue:9 pages:550-552
ISSN: 0741-3106
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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