|ITEM METADATA RECORD
|Title: ||Diode analysis of advanced processing modules for deep-submicrometer CMOS technology nodes|
|Authors: ||Poyai, Amporn ×|
Rooyackers, Rita #
|Issue Date: ||2003 |
|Series Title: ||Journal of the Electrochemical Society vol:150 issue:12 pages:G795-G806|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
× corresponding author|
# (joint) last author|
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