ITEM METADATA RECORD
Title: Diode analysis of advanced processing modules for deep-submicrometer CMOS technology nodes
Authors: Poyai, Amporn ×
Simoen, Eddy
Claeys, Corneel
Rooyackers, Rita #
Issue Date: 2003
Series Title: Journal of the Electrochemical Society vol:150 issue:12 pages:G795-G806
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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