Title: Characterization of oxide precipitates in heavily boron doped silicon by infrared spectroscopy
Authors: De Gryse, O ×
Clauws, P
Vanhellemont, Jan
Lebedev, O.I
Van Landuyt, J
Simoen, Eddy
Claeys, Corneel #
Issue Date: 2004
Series Title: Journal of the Electrochemical Society vol:151 issue:9 pages:G598-G605
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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