ITEM METADATA RECORD
Title: Characterization of oxide precipitates in heavily boron doped silicon by infrared spectroscopy
Authors: De Gryse, O ×
Clauws, P
Vanhellemont, Jan
Lebedev, O.I
Van Landuyt, J
Simoen, Eddy
Claeys, Corneel #
Issue Date: 2004
Series Title: Journal of the Electrochemical Society vol:151 issue:9 pages:G598-G605
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy

 




All items in Lirias are protected by copyright, with all rights reserved.

© Web of science