Title: Local electric field in silicided shallow junctions
Authors: Czerwinski, A ×
Simoen, Eddy
Poyai, Amporn
Claeys, Corneel #
Issue Date: 2004
Series Title: Journal of the Electrochemical Society vol:151 issue:9 pages:G578-G582
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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