Title: Carrier illumination as a tool to probe implant dose and electrical activation
Authors: Vandervorst, Wilfried ×
Clarysse, Trudo
Brijs, Bert
Loo, Roger
Peytier, Ivan
Pawlak, Bartek
Budiarto, E
Borden, P #
Issue Date: 2003
Publisher: AIP
Host Document: pages:758-763
Conference: Characterization and Metrology for ULSI Technology location:Leuven Belgium date:24/03/03
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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